Park 3DM

Park NX-3DM is the completely automated AFM system designed for overhang profiles, high-resolution sidewall imaging, and critical angle measurements. With the decoupled XY and Z scanning system with tilted Z-scanner, it overcomes the challenges of the normal and flare tip methods in accurate sidewall analysis. In utilizing our True Non-Contact Mode™, the Park NX-3DM enables non-destructive measurement of soft photoresist surfaces with high aspect ratio tips.